Superconducting cavity electromechanics on a silicon-on-insulator platform Journal Article

Author(s): Dieterle, Paul B; Kalaee, Mahmoud; Fink, Johannes; Painter, Oskar
Article Title: Superconducting cavity electromechanics on a silicon-on-insulator platform
Affiliation IST Austria
Abstract: Fabrication processes involving anhydrous hydrofluoric vapor etching are developed to create high-Q aluminum superconducting microwave resonators on free-standing silicon membranes formed from a silicon-on-insulator wafer. Using this fabrication process, a high-impedance 8.9-GHz coil resonator is coupled capacitively with a large participation ratio to a 9.7-MHz micromechanical resonator. Two-tone microwave spectroscopy and radiation pressure backaction are used to characterize the coupled system in a dilution refrigerator down to temperatures of Tf=11  mK, yielding a measured electromechanical vacuum coupling rate of g0/2π=24.6  Hz and a mechanical resonator Q factor of Qm=1.7×107. Microwave backaction cooling of the mechanical resonator is also studied, with a minimum phonon occupancy of nm≈16 phonons being realized at an elevated fridge temperature of Tf=211  mK.
Journal Title: Physical Review Applied
Volume: 6
Issue 1
ISSN: 2331-7019
Publisher: American Physical Society  
Date Published: 2016-07-01
Start Page: Article number: 014013
DOI: 10.1103/PhysRevApplied.6.014013
Notes: The authors would like to thank Dan Vestyck at SPTS for performing trial HF vapor etch fabrication runs, and Barry Baker for his good humor and tireless effort to get the HF vapor etcher set up at Caltech. The authors also thank Alessandro Pitanti and Richard Norte for their contributions to initial fabrication development in SOI. This work was supported by the AFOSR through the “ Wiring Quantum Networks with Mechanical Transducers ” MURI program, the Institute for Quantum Information and Matter, an NSF Physics Frontiers Center with support of the Gordon and Betty Moore Foundation, and the Kavli Nanoscience Institute at Caltech. P. B. D. acknowledges support from a Barry Goldwater Scholarship.
Open access: yes (repository)