Tunable mechanical coupling between driven microelectromechanical resonators Journal Article


Author(s): Verbiest, G J; Xu, D.; Goldsche, Matthias; Khodkov, Timofiy; Barzanjeh, Shabir; von den Driesch, H; Buca, Dan; Stampfer, Christoph
Article Title: Tunable mechanical coupling between driven microelectromechanical resonators
Affiliation IST Austria
Abstract: We present a microelectromechanical system, in which a silicon beam is attached to a comb-drive actuator, which is used to tune the tension in the silicon beam and thus its resonance frequency. By measuring the resonance frequencies of the system, we show that the comb-drive actuator and the silicon beam behave as two strongly coupled resonators. Interestingly, the effective coupling rate (1.5 MHz) is tunable with the comb-drive actuator (10%) as well as with a side-gate (10%) placed close to the silicon beam. In contrast, the effective spring constant of the system is insensitive to either of them and changes only by 60.5%. Finally, we show that the comb-drive actuator can be used to switch between different coupling rates with a frequency of at least 10 kHz.
Keywords: microelectromechanical
Journal Title: Applied Physics Letter
Volume: 109
ISSN: 1077-3118
Publisher: Applied Physics Letter  
Date Published: 2016-10-04
Start Page: Article number: 143507
Sponsor: We acknowledge the support from the Helmholtz Nanoelectronic Facility (HNF) and funding from the ERC (GA-Nr. 280140).
URL:
DOI: 10.1063/1.4964122
Open access: yes (repository)